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New method for imaging atoms

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4 Author(s)
Juying Dou ; Microelectronic Engineering Department, Xi’an Jiaotong University, Xian 710049, People’s Republic of ChinaYunnan University, Kunming 650091, People’s Republic of China ; Ergang Chen ; Changchun Zhu ; Yang, Deqing

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.1318191 

We introduce the principle on a new high resolution thermal field emission microscope (HRTFEM). The crystalline structures of W(111), W(100), and W(110) tips have been observed. Both theoretical analyses and experiments show that HRTFEM has high resolving power with which atoms can be distinguished clearly. By using this HRTFEM, the states of atoms on tip surface can be studied easily. © 2000 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:18 ,  Issue: 6 )

Date of Publication:

Nov 2000

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