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We introduce the principle on a new high resolution thermal field emission microscope (HRTFEM). The crystalline structures of W(111), W(100), and W(110) tips have been observed. Both theoretical analyses and experiments show that HRTFEM has high resolving power with which atoms can be distinguished clearly. By using this HRTFEM, the states of atoms on tip surface can be studied easily. © 2000 American Vacuum Society.