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Thermal stability in diamond-like carbon coated planar electron field emission arrays

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4 Author(s)
Lin, Chin-Maw ; Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan 701, Republic of China ; Shoou-Jinn Chang ; Yokoyama, M. ; Lin, I-Nan

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Diamond-like carbon (DLC) films fabricated by a pulsed laser deposition process are a very promising base material for a field emitter. An electron field emission array (FEA) with planar structure is necessary to utilize DLC materials as electron emitters. Thus, the behavior of DLC films must be examined during the elevated temperatures of the FEA packaging process. In this work, thermal annealing up to 500 °C is carried out in a nitrogen ambient to investigate the thermal stability of the field emission. Experimental results indicate that the resulting emission current remains stable as compared with the emission characteristic of nonannealed DLC films. © 2000 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:18 ,  Issue: 5 )