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Nanoscale surface modification and nanostructural fabrication of YBa2Cu3O7-x thin films by scanning tunneling microscopy

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3 Author(s)
Fan, Y.C. ; Department of Electronic Engineering and Physics, University of Dundee, Dundee DD1 4HN, United Kingdom ; Fitzgerald, A.G. ; Cairns, J.A.

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The scanning tunneling microscope has been used to modify the surface of YBa2Cu3O7-x (YBCO) high Tc superconducting thin films by operating the instrument in the so-called mechanical milling or field-induced evaporation mode. Nanostructures such as holes, lines, and trenches were fabricated on the YBCO thin film surface in a controlled manner. In the surface modification and nanostructure fabrication processes, the effect of bias voltage, tunneling current, and scanning feedback control parameters on the modification efficiency have been investigated. © 2000 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:18 ,  Issue: 5 )