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The feasibility of using sculptured thin film technology to engineer multiphase low-permittivity (also called low-k) materials for microelectronic and electronic packaging applications is established via a numerical study. The chosen films are theoretically modeled as multiphase, uniaxial, dielectric nanocomposite materials and their anisotropic relative permittivity tensors are estimated using the Bruggeman formalism. © 2000 American Vacuum Society.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:18 , Issue: 1 )
Date of Publication: Jan 2000