Photoconductivity and photo-Hall density measurements using an infrared light emitting diode as the light source were carried out on single silicon delta-doped Al0.30Ga0.70As samples as a function of temperature. The samples were grown by molecular beam epitaxy at 530 °C and 600 °C. We have studied the effect of etching the cap layer on the electrical transport properties. An observed persistent photoconductivity effect is explained using a model of parallel conduction in two nearby spatially separated channels. We will present evidence that the DX center is not active for nearly ideal delta-doped samples. We have proposed that the DX-center level related to the conduction-band minimum is strongly dependent on the silicon delta-doping density and on the growth conditions. © 1997 American Vacuum Society.
Published in:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
(Volume:15
,
Issue:
4
)
Date of Publication:
Jul 1997
- Page(s):
-
870
-
875
- ISSN :
-
1071-1023
- Digital Object Identifier :
-
10.1116/1.589500
- Date of Current Version :
-
18 June 2009
- Issue Date :
-
Jul 1997