By Topic

Field emission from amorphous diamond coated Mo tip emitters by pulsed laser deposition

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

9 Author(s)
Ding, M.Q. ; Department of Materials Science and Engineering, North Carolina State University, Raleigh, North Carolina 27695-7907 ; Myers, A.F. ; Choi, W.B. ; Vispute, R.D.
more authors

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1116/1.589495 

Previous studies have shown that carbon films deposited on needle-shaped Si emitters by filtered cathodic arc are amorphous with a high sp2 content. These results can be ascribed to the poor thermal conductivity inherent to this geometry. Our present studies overcome this difficulty by depositing amorphous diamond films on Mo tip emitters by pulsed laser deposition. Monitoring films were grown on sapphire substrates and appeared transparent with a resistivity greater than 1×106 Ω cm, showing a typical amorphous diamond nature. Electron energy loss spectroscopy showed that the sp3 content of the film was 50% at the apex of the tip and 30% at the shank, which was lower than on planar substrates. High resolution transmission electron microscopy images revealed that the film at the apex was much denser than that at the shank, but both film showed a nano-columnar microstructure. Selected area electron diffraction confirmed that the films were amorphous in nature. Field emission from coated Mo tip emitters showed a considerable improvement in both turn-on voltage and emission current, compared with the same emitter before deposition. It has been demonstrated for the first time, that a-D films can be deposited on Mo tip emitters by pulsed laser deposition to achieve a better emission performance and the observation of this in the as-deposited structure. © 1997 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:15 ,  Issue: 4 )