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Force modulation atomic force microscopy recording for ultrahigh density recording

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6 Author(s)
Hosaka, S. ; Advanced Research Laboratory, Hitachi Limited, 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185, Japan ; Koyanagi, H. ; Kikukawa, A. ; Miyamoto, M.
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We propose force modulation atomic force microscopy (FM)-(AFM) pit recording and demonstrate the possibility of achieving ultrahigh density recording with high speed readout. A minimum pit size of around 10 nm in diameter is formed by cold plastic deformation of the polycarbonate disk surface at a force of over 40 nN. Using a prototype of the rotation type FM-AFM pit recording system, an ultrahigh recording density of 1.2 Tb/in.2 and a readout speed of 1.25 Mb/s are demonstrated in 1/2(2,7) code recording. © 1997 American Vacuum Society.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:15 ,  Issue: 4 )