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Magnetic nanostructures fabricated by scanning tunneling microscope-assisted chemical vapor deposition

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4 Author(s)
Pai, Woei Wu ; Solid State Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6057 ; Zhang, Jiandi ; Wendelken, John F. ; Warmack, R.J.

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We have successfully used scanning tunneling microscope-assisted chemical vapor deposition to fabricate magnetic nanostructures as fine as 5 nm wide and 2 nm high using ferrocene [Fe(C5H5)2] as the metal-organic source gas. The physical properties of these nanostructures were qualitatively characterized and ex situ magnetic force microscopy measurements indicate these features are strongly magnetic.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:15 ,  Issue: 4 )

Date of Publication:

Jul 1997

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