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We have studied an eight‐pole transmission line deflector, with the aim of obtaining a large bandwidth deflector with higher deflection sensitivity than an electrostatic deflector. We show that each electrode can be designed as a transmission line with a characteristic impedance that is independent of the orientation of the deflection field. In a transmission line deflector, the deflection field travels along the optical axis at the speed of light, either in the same direction as the electrons (conventional field direction, CFD) or in the opposite direction (opposite field direction, OFD). We show that at high frequencies neither CFD nor OFD improves the deflection sensitivity, due to the magnetic field in a transverse electromagnetic (TEM) wave. Therefore, this deflector is not suitable for achieving the goal of increased sensitivity. However, the OFD achieves the same sensitivity as an electrostatic deflector using a shorter axial length. Finally, the deflection sensitivity of the transmission line deflector proves to be frequency dependent in the frequency range between 100 Hz and 200 kHz, which is illustrated in the experimental results presented.
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures (Volume:9 , Issue: 6 )
Date of Publication: Nov 1991