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1 Author(s)
J. Mar ; Intel Corp., Santa Clara, CA, USA

Major changes have occurred in the technology CAD field in recent years-trends that promise to significantly increase roles for TCAD tools. Emerging trends in statistical design, interconnect engineering, and automated technology optimization are analyzed, together with their implications on TCAD modeling

Published in:

Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on

Date of Conference:

6-10 Nov 1995