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Luminescent porous polycrystalline silicon film

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6 Author(s)
Han, P.G. ; Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Clearwater Bay, Hong Kong ; Poon, M.C. ; Ko, P.K. ; Sin, J.K.O.
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This paper will present new growth mechanisms, nanostructures and photoluminescence results on porous polycrystalline silicon films. The possible explanations and models will also be proposed and discussed

Published in:

Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on

Date of Conference:

6-10 Nov 1995