Fabrication and dynamic testing of electrostatic actuators with p/sup +/ silicon diaphragms

This paper presents the fabrication and testing of electrostatic actuators. The p/sup +/ diaphragm is used as a moving electrode, whereas the aluminum layer deposited on a #7740 pyrex glass is used as a fixed electrode. The dynamic characteristics of the actuator with the corrugated diaphragm and that with the flat one are tested and compared with the calculation results, respectively.