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Fabrication and dynamic testing of electrostatic actuators with p + silicon diaphragms

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4 Author(s)
Yang, E.H. ; Dept. of Control & Instrum. Eng., Ajou Univ., Suwon, South Korea ; Yang, S.S. ; Han, S.W. ; Kim, S.Y.

This paper presents the fabrication and testing of electrostatic actuators. The p+ diaphragm is used as a moving electrode, whereas the aluminum layer deposited on a #7740 pyrex glass is used as a fixed electrode. The dynamic characteristics of the actuator with the corrugated diaphragm and that with the flat one are tested and compared with the calculation results, respectively

Published in:

Microelectronics and VLSI, 1995. TENCON '95., IEEE Region 10 International Conference on

Date of Conference:

6-10 Nov 1995