By Topic

Theoretical study on deposition temperature during arc ion plating

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Huang, M.D. ; Quantum Photonic Science Research Center and Department of Physics, Hanyang University, Seoul 133-791, Korea ; Lee, Y.P. ; Dong, C. ; Wen, L.S.

Your organization might have access to this article on the publisher's site. To check, click on this link: 

A model, based on the laws of energy conservation, for the estimation of substrate temperature during the process of arc ion plating, has been established by considering only the major influencing factors. The calculated temperatures based on this model turn out to be coincident with the experimental ones at different dc biases. The effects of several experimental parameters are also discussed. Using the established model, the substrate temperatures can be predicted, which is very useful for the relevant engineering applications. © 2004 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:22 ,  Issue: 4 )