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Theoretical study on deposition temperature during arc ion plating

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4 Author(s)
Huang, M.D. ; Quantum Photonic Science Research Center and Department of Physics, Hanyang University, Seoul 133-791, Korea ; Lee, Y.P. ; Dong, C. ; Wen, L.S.

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A model, based on the laws of energy conservation, for the estimation of substrate temperature during the process of arc ion plating, has been established by considering only the major influencing factors. The calculated temperatures based on this model turn out to be coincident with the experimental ones at different dc biases. The effects of several experimental parameters are also discussed. Using the established model, the substrate temperatures can be predicted, which is very useful for the relevant engineering applications. © 2004 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:22 ,  Issue: 4 )