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Effect of deposition temperature on thermal stability in high-density plasma chemical vapor deposition fluorine-doped silicon dioxide

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9 Author(s)
Cheng, Y.L. ; Department of Material Science and Engineering, National Chiao-Tung University, Hsin-Chu, Taiwan, Republic of China ; Wang, Y.L. ; Chen, H.W. ; Lan, J.L.
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Thermal stability of fluorine-doped silicon dioxide films deposited by high-density plasma chemical vapor deposition as a function of deposition temperature were investigated in this study. Both thermal desorption spectrum and annealing test results show that SiOF films deposited above 400 °C have better thermal stability. Furnace annealing data indicate that non SiF bonding fluorine does exist in low-deposition-temperature SiOF films. Furthermore, secondary-ion mass spectrometer results also reveal that the fluorine in SiOF films with a lower-deposition temperature is easily diffused out and turned into the underlayer, which results in less thermally stable SiOF films. Moreover, short-loop simulation results have been subsequently tested and it was concluded that the deposition temperature of the SiOF film is extremely important for thermal stability. © 2004 American Vacuum Society.

Published in:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:22 ,  Issue: 3 )

Date of Publication:

May 2004

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