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Titanium alloy material with very low outgassing

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6 Author(s)
Kurisu, H. ; Department of Advanced Science and Engineering, Faculty of Engineering, Yamaguchi University, Ube Yamaguchi 755-8611, Japan ; Muranaka, T. ; Wada, N. ; Yamamoto, S.
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In this communication we describe a titanium alloy material that has an excellent low outgassing property whose rate is lower than 6×10-13Pa m s-1. This value is much lower than that of standard vacuum materials by three orders of magnitude under the same ordinary pretreatments. In our titanium alloy a natural TiO2 thin layer on the surface acts as an enhanced diffusion channel for dissolved gases, mainly hydrogen, consequently very quick evacuation of gas near the surface gives a very low outgassing rate. © 2003 American Vacuum Society.

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:21 ,  Issue: 5 )