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Technology and realization of metallic curved waveguide mirrors in polymer film waveguides based on anisotropic plasma etching

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7 Author(s)
Wolff, S. ; Integrated Optoelectronics, Physics Department, University of Kaiserslautern, Erwin-Schroedinger-Strasse, 67663 Kaiserslautern, Germany ; Grosse, A. ; Schimper, H.-J. ; Giehl, A.R.
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Curved waveguide mirrors acting in the same way as cylindrical lenses are fabricated in a polymer film waveguide. The waveguide material used is Cyclotene 3022™ (bisbenzocyclobutene) developed by the Dow Chemical Company. The waveguide mirror structure is dry etched into the film waveguide employing electron cyclotron resonance reactive ion etching. To enhance their reflectivity the vertical dry-etched sidewalls are metallized. Curved polymer film waveguide mirrors showing a reflectivity of 75% are realized. © 2001 American Vacuum Society.

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films  (Volume:19 ,  Issue: 1 )