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Near field microscopy of vertical cavity lasers

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4 Author(s)
J. A. Kash ; IBM Thomas J. Watson Res. Center, Yorktown Heights, NY, USA ; B. Pezeshki ; F. Agahi ; D. W. Kisker

We show that near-field optical microscopy (NFOM) can be a powerful tool for the diagnosis and characterization of semiconductor laser structures, since it can obtain optical spectra with a spatial resolution better than 100nm. The capabilities of NFOM are demonstrated by characterizing a VCSEL in which spatial nonuniformities in the material cause a multi-mode emission pattern

Published in:

Lasers and Electro-Optics Society Annual Meeting, 1995. 8th Annual Meeting Conference Proceedings, Volume 1., IEEE  (Volume:2 )

Date of Conference:

30 Oct-2 Nov 1995