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Development of an intelligent scheduler for semiconductor manufacturing facilities

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4 Author(s)
E. Schorn-DiSalvi ; Dept. of Ind. Eng., Texas A&M Univ., College Station, TX, USA ; R. Liquigan ; B. A. Peters ; J. S. Smith

Considerable academic research has investigated the topic of scheduling in manufacturing systems. This research investigates the available academic literature and commercial scheduling systems with respect to their applicability in semiconductor manufacturing systems. It recommends a design of an "intelligent scheduler" that attempts to use global information about the fab status and combines the applicable analytical methods from the academic literature with a simulation based evaluation tool into a decision support environment.

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1995. ASMC 95 Proceedings. IEEE/SEMI 1995

Date of Conference:

13-15 Nov 1995