Porous silicon with different pore sizes and / or densities impregnated with different metallic nanoparticles by various methods and techniques is subject of microstructural investigation by X-ray diffraction, X-ray reflectivity studies and SEM imaging. Crystallite sizes, texture and phase identification is revealed and their use in various applications (biosensors, fuel cell catalyst, etc) is evaluated.
Published in:
Semiconductor Conference, 2008. CAS 2008. International
(Volume:2
)
Date of Conference: 13-15 Oct. 2008