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The development and application of novel Ru precursors for atmospheric pressure MOVPE growth of Ru doped current blocking layers

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12 Author(s)

Ru precursors IPCPRu and IBCPRu have been developed as alternatives to DMRu. Stability trials and atmospheric pressure MOVPE growth investigations have led to their successful application for Ru doped InP current blocking layers in laser devices.

Published in:

Indium Phosphide and Related Materials, 2008. IPRM 2008. 20th International Conference on

Date of Conference:

25-29 May 2008

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