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Phased array signal processing for ultrasonic position measurement using resonant microsensors

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3 Author(s)
Yamashita, K. ; Kyoto Inst. of Technol., Kyoto ; Noda, M. ; Okuyama, M.

A simple signal processing method has been proposed for ultrasonic position measurement using resonant microsensors. Micro-fabricated sensors have a high quality factor of mechanical resonance and the high Q-value realizes a high sensitivity, but also causes a long tail of dumping oscillation in a response waveform against a ultrasound pulse. The proposed method reveals pulse arrival points in superposed dumping oscillations by eliminating the long tail. This method has been applied to micro-fabricated resonant sensors with high Q-value and a precise position measurement result is demonstrated.

Published in:

Automation Congress, 2008. WAC 2008. World

Date of Conference:

Sept. 28 2008-Oct. 2 2008