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The surface acoustic wave motor in this study utilized transparent lithium niobate for a stator. We then measured the normal and tangential displacements of the frictional surface of the slider via the transparent stator by means of 2 laser Doppler vibrometers. We thoroughly inspected the measurement conditions and indicated that the measured data were reliable and usable for subsequent precise analyses of the friction drive. The driving conditions for the measurements were a driving frequency of 9.61 MHz and a wave vibration amplitude of 20 nm. The start-up transients of the motor for a duration of 10.4 mus were measured. The measurements showed that the frictional surface of the slider displaced in both the normal and tangential directions followed each wave vibration. The displacements increased with the wave's vibration amplitude: they increased to 10 nm in both directions, in response to the transient increase of the wave's vibration amplitude to 20 nm, under the 15 N preload condition. Moreover, the slider surface rotated in the same direction as the wave surface and its trajectories were a tilted elliptical orbit. Since the surface of the wave rotated in an upright elliptical orbit, the result indicated that the tangential displacement of the slider surface was delayed in relation to that of the wave. The delay was in the range from 30deg to 60deg under the 15 N preload condition.
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on (Volume:55 , Issue: 9 )
Date of Publication: September 2008