Laser-machined Piezoelectric Cantilevers for Mechanical Energy Harvesting

In this study, we report results on a piezoelectricmaterial- based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s/
²
). The device was found to generate continuous power of 1.13 μW at 870 Hz across a 288.5 kΩload with a power density of 301.3 μW/cm/
³
.