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Highly Sensitive ZnO Nanowire Acetone Vapor Sensor With Au Adsorption

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8 Author(s)
Shoou-Jinn Chang ; Inst. of Microelectron. & the Dept. of Electr. Eng., Nat. Cheng Kung Univ., Tainan ; Ting-Jen Hsueh ; I-Cherng Chen ; Shang-Fu Hsieh
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In this study, the growth of high-density single-crystalline ZnO nanowires on patterned ZnO:Ga/ SiO2/Si templates was reported. We also adsorbed Au onto nanowire surfaces and fabricated ZnO nanowire acetone vapor sensors. With 200-ppm acetone vapor concentration, it was found that we could enhance the device sensitivities at 300deg C from 18.5% to 82.5% by Au adsorption. It was also found that measured responses at 300degC were around 52%, 61%, 71%, 77%, and 82% when the accumulative acetone vapor concentration reached 5, 10, 50, 100, and 200 ppm, respectively, for the ZnO nanowire sensor with Au adsorption.

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IEEE Transactions on Nanotechnology  (Volume:7 ,  Issue: 6 )