Referenced Items are not available for this document.
A submicrometer integrated optical sensor based on Bragg gratings in silicon-on-insulator technology is theoretically proposed in this paper. The grating analysis is performed using a mixed numerical approach based on the finite-element method and coupled mode theory. The possibility to use third-order instead of first-order grating is discussed and performances compared, thus overcoming fabrication problems associated to submicrometer scale features. A detection limit of approximately 10-4 refractive index unit has been calculated for a 173-mum-long grating. Strategies to further improve this value have been discussed too. Finally, fabrication tolerances influence on optimized gratings has been investigated.
Published in:
Sensors Journal, IEEE
(Volume:8
,
Issue:
9
)
Date of Publication: Sept. 2008
- Page(s):
- 1603 - 1611
- ISSN :
- 1530-437X
- INSPEC Accession Number:
- 10207888
- Digital Object Identifier :
- 10.1109/JSEN.2008.929068
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 29 August 2008
- Issue Date :
- Sept. 2008
- Sponsored by :
- IEEE Sensors Council
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
