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Fabrication of lenses for AlGaInP LEDs using Step and Flash Imprint lithography

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4 Author(s)
Kettle, J. ; Manuf. Eng. Centre, Cardiff Univ., Cardiff ; Lalev, G. ; Dimov, S. ; Perks, R.

This paper describes a new data preparation technique, which allows for the design of optical lenses in a conventional CAD package and immediate transfer to a lithographic system, for example Electron Beam or Focused Ion Beam Lithography. Most importantly, we show that this approach could be used to fabricate lens arrays in templates for Step-and Flash Imprint lithography onto 4iquestwafers. One application for this is to enhancing AlGaInP LED performance by texturing the top current spreading layer.

Published in:

Nanotechnology, 2007. IEEE-NANO 2007. 7th IEEE Conference on

Date of Conference:

2-5 Aug. 2007