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A micromachined vibratory gyroscope with two proof-masses to measure rotation rate is presented. The two proof-masses are driven electrostatically in opposite directions along drive axis to generate differential Coriolis force detection. In order to improve the performance of the MEMS gyroscope, an adaptive control method is developed. This scheme tunes the drive natural frequencies of gyroscope to a given frequency, regulates the amplitudes of the drive axis to a required value, achieves translational acceleration elimination, cancels out quadrature error due to stiffness coupling, and drives the sense axis vibration to zero for dynamic range and precision improvement. Simulation results verify the theoretical analysis.
Date of Conference: 2-5 Aug. 2007