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DEP-based fabrication and characterization of electronic-grade CNTs for nano-sensing applications

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6 Author(s)
Mengxing Ouyang ; Centre for Micro and Nano Systems, Department of Mechanical and Automation Engineering, The Chinese University of Hong Kong, Shatin, N.T., China ; Mandy L. Y. Sin ; Gary C. T. Chow ; Wen J. Li
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Sensing devices using electronic-grade carbon nanotubes (EG-CNTs) as resistive sensing element were fabricated by dielectrophoresis (DEP) manipulation. DEP-based fabrication of EG-CNTs is important as it allows some control of the nominal resistance of the fabricated sensors, which is essential to improve the SNR of CNT sensors. The devices were characterized and the potential of EG-CNTs to serve as a novel temperature and humidity sensing element has been demonstrated. Electrical characterization revealed that the EG-CNTs sensors, which exhibit large linear IiquestV range, have both positive and negative TCR at higher operational temperatures. In addition, its resistance-humidity linear dependency proves its humidity sensing capability. Moreover, the EG-CNTs device is capable of operating in nW range. On the foundation of these measurements, we aim to prove EG-CNTs as a promising material for future applications in nano-sensing.

Published in:

2007 7th IEEE Conference on Nanotechnology (IEEE NANO)

Date of Conference:

2-5 Aug. 2007