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Templating and Replication of Spiral Photonic Crystals for Silicon Photonics

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7 Author(s)

This paper describes femtosecond laser lithography of 3-D photonic crystal templates in commercial photoresist SU-8 and replication of these templates with silicon. Using this approach, silicon-based photonic crystals having 3-D square spiral architecture and exhibiting photonic stop gaps near the 2.5- mum wavelength were fabricated. Possibilities to use a multiple-beam interference technique for two-photon absorption templating of photonic crystals are explored.

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Selected Topics in Quantum Electronics, IEEE Journal of  (Volume:14 ,  Issue: 4 )