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AlN/GaN Insulated-Gate HEMTs With 2.3 A/mm Output Current and 480 mS/mm Transconductance

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7 Author(s)
Tom Zimmermann ; Dept. of Electr. Eng., Univ. of Notre Dame, Notre Dame, IN ; David Deen ; Yu Cao ; John Simon
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High-electron mobility transistors (HEMTs) based on ultrathin AIN/GaN heterostructures with a 3.5-nm AlN barrier and a 3-nm Al2O3 gate dielectric have been investigated. Owing to the optimized AIN/GaN interface, very high carrier mobility (~1400 cm2/V ldr s) and high 2-D electron-gas density (~2.7times1013/cm2) resulted in a record low sheet resistance (~165 Omega/sq). The resultant HEMTs showed a maximum dc output current density of ~2.3 A/mm and a peak extrinsic transconductance gm,ext~480 mS/mm (corresponding to gm,int~1 S/mm). An fT/fmax of 52/60 GHz was measured on 0.25times60 mum2 gate HEMTs. With further improvements of the ohmic contacts, the gate dielectric, and the lowering of the buffer leakage, the presented results suggest that, by using AIN/GaN heterojunctions, it may be possible to push the performance of nitride HEMTs to current, power, and speed levels that are currently unachievable in AlGaN/GaN technology.

Published in:

IEEE Electron Device Letters  (Volume:29 ,  Issue: 7 )