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In this paper, we present a passive reduced-order macromodeling algorithm for second-order dynamic systems of linear microelectromechanical systems (MEMS) devices. The proposed reduction algorithm is based on congruent transformations. The system equations of MEMS devices, given by finite-element methods (FEMs), are converted to state-space forms that are compatible with passive Krylov subspace methods. To achieve this, a modified matrix equation is proposed for second-order MEMS dynamics. In addition, the generalized procedure is provided for first-order heat transfer problems and second-order structure dynamic problems to ensure that the discretized FEM system satisfies all the necessary conditions to guarantee the passivity of the reduced-order system. Finally, numerical examples are provided to demonstrate the validity of the proposed passive reduction technique.
Published in:
Microelectromechanical Systems, Journal of
(Volume:17
,
Issue:
3
)
Date of Publication: June 2008
- Page(s):
- 678 - 687
- ISSN :
- 1057-7157
- INSPEC Accession Number:
- 10050658
- Digital Object Identifier :
- 10.1109/JMEMS.2008.921673
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 June 2008
- Issue Date :
- June 2008
- Sponsored by :
- IEEE Electron Devices Society
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