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Metamorphic AlInAs/GaInAs high-electron mobility transistors with very good device performance have been grown by metal-organic chemical vapor deposition (MOCVD), with the introduction of an effective multistage buffering scheme. Measured room-temperature Hall mobilities of the 2-DEG were over 8000 cm2/V ldr s with sheet carrier densities larger than 4 times 1012 cm-2. Transistors with 1-mum gate length exhibited transconductance up to 626 mS/mm. The unity current gain cutoff frequency fT and the maximum oscillation frequency fmax were 39.1 and 71 GHz, respectively. These results are very encouraging toward the manufacturing of metamorphic devices on GaAs substrates by MOCVD.
Date of Publication: June 2008