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A Radiation Imaging Detector Made by Postprocessing a Standard CMOS Chip

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8 Author(s)
Carballo, V.M.B. ; Inst. for Nanotechnol., Univ. of Twente, Enschede ; Chefdeville, M. ; Fransen, M. ; van der Graaf, Harry
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An unpackaged microchip is used as the sensing element in a miniaturized gaseous proportional chamber. This letter reports on the fabrication and performance of a complete radiation imaging detector based on this principle. Our fabrication schemes are based on wafer-scale and chip-scale postprocessing. Compared to hybrid-assembled gaseous detectors, our microsystem shows superior alignment precision and energy resolution, and offers the capability to unambiguously reconstruct 3D radiation tracks on the spot.

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Electron Device Letters, IEEE  (Volume:29 ,  Issue: 6 )