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The paper demonstrates an advanced simulation methodology based on differentiation of the discretized Finite Element (FE) equations for parameterization of MEMS macromodels. The idea of the approach is to compute not only the governing system matrices but also high order derivatives (HOD) with regard to design parameters by means of Automatic Differentiation (AD). As result, Taylor vectors of the model response can be expanded in the vicinity of the initial position with regard to dimensional and physical parameters. The objective of this presentation is to demonstrate the viability of HOD methods to parameterization of the mode superposition based Reduced Order Models (ROM) of the coupled- physics domains.