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Sensitivity-maximizing and error-reducing design of a flow and thermal property sensor

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2 Author(s)
Cubukcu, A.S. ; Dept. of Microsyst. Eng., Univ. of Freiburg, Freiburg ; Urban, G.A.

A combined-application nanocalorimeter is being developed at IMTEK in order to sense both flow and thermal properties of the flowing medium at the same time. It is designed to measure flow velocity, direction, thermal conductivity of the fluid, and its specific heat by application of a sinusoidal heating. In this report, we present the effects of design geometry and temperature sensor locations on accuracy and sensitivity, respectively. Flow measurement range and flow direction dependence of a 2D flow sensor are investigated via 3D FEM simulations. Based on the results of the simulations, the sensor will exhibit maximum sensitivity and a reduced error.

Published in:

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Micro-Systems, 2008. EuroSimE 2008. International Conference on

Date of Conference:

20-23 April 2008