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Nano particle deposition system (NPDS) is the newly developed ceramic and metal coating process. Nano and micro sized powders are sprayed through the supersonic nozzle at room temperature and low vacuum condition and deposited on various substrates. In this research, ceramic titanium dioxide (TiO2) coatings were deposited on metal substrates (SUS, Cu, Al) and polymer substrates (PET, PMMA), and metal tin (Sn) coating was deposited on SUS substrate. Coatings were fabricated with rectangular and line shapes at high deposition rate and without causing thermal damage on the substrates. Deposition images and material properties such as chemical composition and morphology were measured. The test results showed that the NPDS provides a new coating method of ceramic and metal materials with large surface area.