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Room Temperature Nanoimprint Lithography Using Molds Fabricated by Molecular Beam Epitaxy

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6 Author(s)
Harrer, S. ; Inst. for Nanoelectron., Tech. Univ. Munchen, Munich ; Strobel, Sebastian ; Scarpa, G. ; Abstreiter, G.
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We have demonstrated single-step room temperature nanoimprint lithography (RTNIL) using polystyrene (PS, average molecular weights ranging from 13 to 97 kg/mol) as the imprint polymer layer on a silicon substrate for imprinting rectangular line patterns with varying aspect ratios, ranging from 11 to 500 nm wide. To accomplish this demonstration, we designed and built a tool that controllably pressed a mold into a stationary imprint sample applying imprint pressures between 280 and 700 MPa. The molds used in these experiments were GaAs/AlGaAs sandwich structures fabricated by molecular beam epitaxy (MBE) that we cleaved and selectively etched afterward in order to generate 3-D grating structures with nanometer resolution on their edges. We fabricated positive and negative molds comprising single- line as well as multiline patterns with different aspect ratios and linewidths between 9 and 300 nm.

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Nanotechnology, IEEE Transactions on  (Volume:7 ,  Issue: 3 )