We have developed MeME-X process to break-through the conventional miniaturization limit of the pressure-driven micro active catheter by two orders of magnitude. The world's smallest micro active catheter of r~200mum was successfully fabricated using MeME-X process. The catheter was made of thin biocompatible polymer membrane and actuated just by water pressure for safe intravascular surgery.
Published in:
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on
Date of Conference: 13-17 Jan. 2008