By Topic

Deformable Polymer Adaptive Optical Mirrors

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Friese, C. ; Freiburg Univ., Reutlingen ; Zappe, H.

The design, fabrication, and evaluation of deformable polymer-based micromirror devices for adaptive optic applications are described. For the mirror membranes, a freestanding polymer foil is used, which features key advantages with respect to its mechanical behavior when compared with the silicon-micromachined membranes. The fabrication technology, mirror-membrane design, packaging, and operation in a feedback-controlled closed-loop system are outlined. The feasibility for the use of the prototypes in advanced adaptive optic systems is evaluated.

Published in:

Microelectromechanical Systems, Journal of  (Volume:17 ,  Issue: 1 )