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Deformable Polymer Adaptive Optical Mirrors

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2 Author(s)
Friese, C. ; Freiburg Univ., Reutlingen ; Zappe, H.

The design, fabrication, and evaluation of deformable polymer-based micromirror devices for adaptive optic applications are described. For the mirror membranes, a freestanding polymer foil is used, which features key advantages with respect to its mechanical behavior when compared with the silicon-micromachined membranes. The fabrication technology, mirror-membrane design, packaging, and operation in a feedback-controlled closed-loop system are outlined. The feasibility for the use of the prototypes in advanced adaptive optic systems is evaluated.

Published in:

Microelectromechanical Systems, Journal of  (Volume:17 ,  Issue: 1 )

Date of Publication:

Feb. 2008

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