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SU-8 surface-micromachining process utilizing PMGI as a sacrificial material

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3 Author(s)
I. G. Foulds ; Institute of Micromachine and Microfabrication Research Simon Fraser University, Burnaby, BC, Canada ; R. W. Johnstone ; M. Parameswaran

This work presents a novel surface micromachining process based on the SU-8 polymer that uses the resist PMGI as a sacrificial layer as well as a lift-off resist for metal patterning. The process is capable of independent patterning of the structural and metal layers which decouples the mechanical and electrical properties of the resulting structures. The process uses inexpensive equipment and materials and can be completed in a single day, making this process ideal for proof of concept prototyping.

Published in:

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Date of Conference:

21-25 Jan. 2007