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Mechanical calibration of MEMS spring with 0.1-μn force resolution

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5 Author(s)
Kenji Miyamoto ; Department of Micro Engineering, Kyoto University, Yoshida-Honmachi, Sakyo-ku, 606-8501 Japan ; Tomoya Jomori ; Koji Sugano ; Osamu Tabata
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The direct calibration of MEMS springs made of single crystal silicon was carried out using a mechanical force measurement tool. The spring device for calibration fabricated from silicon on insulator (SOI) wafer contains four folded-beam springs. The spring constants of different-length devices were directly measured using electromagnetic force-feedback balance, whose force resolution was about 0.2 muN. The spring constants of the two types of folded-beam springs, whose designed constant was 0.3 and 0.7 N/m, were 0.18 and 0.57 N/m, respectively. The spring constants were successfully calibrated, which shows that this tool can calibrate various kinds of MEMS flexible structures.

Published in:

Micro Electro Mechanical Systems, 2007. MEMS. IEEE 20th International Conference on

Date of Conference:

21-25 Jan. 2007