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Mechanical characteristics of LTCC (Low Temperature Cofired Ceramics) -tapes for mechanical application

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3 Author(s)
Unger, M. ; Vienna Univ. of Technol., Vienna ; Smetana, W. ; Ehrenzweig, W.

Various LTCC-tapes of different suppliers have been evaluated concerning their mechanical properties which are required for finite-element-analyses (FEA) in order to design mechanical operating sensors. Bending tests on fired tape samples have been conducted in order to investigate the influence of processing conditions, applied metallization as well as geometrical parameters on the mechanical characteristics. Additionally piezo-resistive thick-film sensors have been applied onto the LTCC-beam elements to correlate bending stress with the sensor signal.

Published in:

Electronics Technology, 30th International Spring Seminar on

Date of Conference:

9-13 May 2007