The authors have implemented a robust CNSPACK-based linear equation solver in an in-house TCAD tool. This solver is enhanced with efficient matrix pre-conditioning algorithms to enable accurate handling of a wide scale of floating-point numbers. Sample results are shown for very low temperature radiation response of a 0.12-mum NMOSFET and I-V curves of 0.13-mum SiGe HBT. The solution is very stable. However, the match against corresponding experimental data is not good due to inaccuracy of physical models (ongoing work).
Published in:
Semiconductor Device Research Symposium, 2007 International
Date of Conference: 12-14 Dec. 2007