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Combining Digital Optical MEMS, CMOS and Algorithms for Unique Display Solutions

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1 Author(s)
Hornbeck, L.J. ; Texas Instrum., Plano

The binary electrostatic actuation of a MEMS micromirror through relatively large rotation angles by a single, low- voltage SRAM cell forms the basis of a digital optical MEMS switch, or DMD pixel, that is fast, scalable, producible and reliable. Arrays of DMD pixels are monolithically integrated on a CMOS chip and combined with optics, algorithms and a light source to produce unique DLPreg front projection and HDTV products. Examples include DLP pocket-class mobile projectors, 3-D enabled DLP HDTVs and DLP Cinemareg projectors.

Published in:

Electron Devices Meeting, 2007. IEDM 2007. IEEE International

Date of Conference:

10-12 Dec. 2007