Cart (Loading....) | Create Account
Close category search window
 

A Petri-Net Approach to Modular Supervision With Conflict Resolution for Semiconductor Manufacturing Systems

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Lee , J.-S. ; Ind. Technol. Res. Inst., Hsinchu ; MengChu Zhou ; Pau Lo Hsu

In a semiconductor manufacturing system, particular human operations may violate desired requirements and lead to destructive failure. For such human-in-the-loop systems, this paper proposes a supervisory framework which guarantees that manual operations meet required specifications so as to prevent human errors in operation using Petri nets. Moreover, a modular technique with an intersection mechanism is proposed in order to cope with the state-space explosion problem of large-scale systems. A rapid thermal process in semiconductor manufacturing systems is provided to show the practicability of the proposed approach. Note to Practitioners - This work was motivated by the requirement of remote monitoring and supervision of semiconductor manufacturing systems. In such human-in-the-loop and large-scale systems, certain human operations may violate desired safety requirements and result in catastrophic failure. Moreover, the overall complexity of most existing Petri net modeling and analysis approaches significantly increases with the size of the considered systems. This paper suggests a modular supervisory scheme for modeling and synthesis of supervisory agents using Petri nets. The proposed method contributes a promising tool for preventing abnormal operations from being carried out to semiconductor manufacturing systems which, if appropriately modified, may be also applied to other types of discrete event systems.

Published in:

Automation Science and Engineering, IEEE Transactions on  (Volume:4 ,  Issue: 4 )

Date of Publication:

Oct. 2007

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.