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Integrated micro chemical systems have been expected as evolutional tools for high speed, functional and compact instrumentations for analysis, synthesis, bio and related sciences and technologies. We have developed general methods for micro integration of chemical systems on the basis of the concept being similar to electronics. In place of resistor, capacitor, and diode in IC, micro unit operations for mixing, extraction, phase separation, etc. have developed as integrated components of microchemical systems. There are two directions of our microchip chemical technologies. One is to make these technologies practical and to commercial use of micro-meter scale chemical system on chip. And the other one is to extend the method to nano-meter scale chemical experiment which is opening new horizon of chemical research tool.