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Non-Contact Sensing for High-Temperature, Capacitive MEMS Sensors in Active Fuel Emission Control

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3 Author(s)
Steven L. Garverick ; Dept. of Electrical Engineering and Computer Science, Case Western Reserve University, Cleveland, OH, U.S.A. steven.garverick@case.edu ; Amita Patil ; Xinyu Yu

This paper describes a non-contact sensor interface for MEMS capacitive sensors used in active fuel emission control (AFEC). The sensor elements are used as passive capacitors in a LC resonant circuit, the resonant frequency being a function of the sensor capacitance. Detailed analysis of the inductive link reveals a desired operation region in which the normalized resonant frequency response is linear, independent of quality factor, and sensitivity is only weakly dependent on antenna coupling factor. High-temperature sensor interface electronics are proposed to lock to the resonant frequency of the inductive tank circuit and provide a digital readout that is communicated to the combustion node controller. These circuits require a gm-stabilized negative conductance to form an oscillator and a high-speed counter that acts as FM demodulator in a multiplexed architecture that accommodates an array of sensors.

Published in:

2007 Fourth International Conference on Networked Sensing Systems

Date of Conference:

6-8 June 2007