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Precise Grating Profile Evaluation for DFB Lasers Using an Optical Metrology

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6 Author(s)
Muroya, Y. ; NEC Electron. Corp., Kanagawa ; Makino, S. ; Umeda, N. ; Okuda, T.
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A precise grating profile evaluation method for distributed-feedback (DFB) laser diodes was achieved using a simple optical metrology. Spectroscopic scatterometry, an optical-wavelength light-diffraction technique, is emerging as a fast, accurate, and nondestructive means of monitoring profiles. A photoresist grating pattern on an InP substrate and an etched InP grating with periods of 0.2 and 0.24 mum were successfully evaluated by using unpolarized simple optical metrology. A precise grating profile evaluation technique with an accuracy of nanometers enabled us to obtain an accurate coupling coefficient (kappaL) for DFB laser diodes. DFB laser diodes with well-controlled kappaL are very promising for practical use in cost-effective optical networks.

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:20 ,  Issue: 3 )