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In this work, CoPtCr-oxide films were deposited with three types of oxide additives(Si-O, Cr-O, Ti-O). Their magnetic, grain morphological properties and oxidation kinetics were systematically studied by varying oxygen reactive sputter conditions and were correlated with PMR performance. CoPtCr-oxide media has been reported to have small grains with good magnetic decoupling for perpendicular recording media. More detailed recording performance including magnetic write width and thermal stability are discussed for all the media at different PO2.