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Scheduling for Backend Manufacturing with SPTB Heuristic

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1 Author(s)
Mohile, M.G. ; Qimonda NA Corp., Sandston

In this paper, we address a mixed-model flow shop scheduling problem that is encountered in the Backend of a semiconductor fabrication facility. The problem is to determine both the production batch sizes of different products (models) and the sequence in which to release them for processing in the Backend facility so as to minimize average cycle time.

Published in:

Advanced Semiconductor Manufacturing Conference, 2007. ASMC 2007. IEEE/SEMI

Date of Conference:

11-12 June 2007